BOC Edwards recently announced that it will supply fluorine gas to Hynix Semiconductor for its 300mm semiconductor manufacturing facility in Ichon, South Korea.
Hynix is the sixth customer to install a BOC Edwards Generation-F fluorine system for use in semiconductor or LCD manufacture.
Due to its zero-impact on global warming, fluorine is fast becoming the next-generation material for cleaning CVD (chemical vapor deposition) chambers used in the manufacture of 300mm semiconductor wafers.
"Fluorine is ideal solution for customers seeking low-cost, environmentally friendly replacement for traditional cleaning chemistries. Our commitment to on-site fluorine generation allows us to offer customers a substantial reduction in the cost of supply compared with cylinder fluorine," commented BOC Edwards.
