Air Products (AP) recently announced that it has commissioned an Air Separation Unit (ASU) and Liquefier at Samsung Electronics' TFT-LCD facility in Tangjeong, Korea.
Tangjeong factory is the first Generation-7 TFT-LCD facility, and the largest TFT-LCD manufacturing facility in the world.
AP, being awarded the long term contracts earlier, is supplying the factory with nitrogen, oxygen, argon, NF3, NH3 and SiH4 through its Bulk Specialty Gases System.
Future requirements for hydrogen and helium are also being accommodated.
The facility requires large amounts of bulk gases and electronics gases, and will consume from five to eight times the amount of nitrogen that a typical semiconductor fabrication facility consumes.
The same factor applies to NF3 requirements.
To support this project, AP will begin construction on a 2nd ASU at Tangjeong. It is tentatively slated for completion in late 2005.
Additionally, AP has allocated space at the Tangjeong for a planned 3rd ASU plant, to be built at a later time for future factories.
