BOC Edwards recently announced that it has successfully completed a two-year fluorine qualification program with Tokyo Electron Limited (TEL), Japan, a major manufacturer of semiconductor production equipment.
The BOC Edwards¡¯ Generation-F80 prototype fluorine generator has supplied up to 80 §¤/hr to TEL¡¯s multiple TELFORMULA 300§® LPCVD tools at Tohoku facility.
"We have experienced good cleaning performance in the process developed for the TELFORMULA tool using BOC Edwards on-site fluorine generation system. On-site fluorine generation represents a new paradigm for the industry¡¯s chamber cleaning requirements," said Yasuyuki Kuriki, TEL vice president.
"Fluorine gas supplied in this way has the potential to offer a substantial reduction in the cost of ownership compared with other perfluorocarbons and cylinder fluorine," said Noel Leeson, president of electronic materials for BOC Edwards.