BOC Edwards recently announced the sale of five bulk special gas systems (BSGS) to support 300mm and other leading-edge, high-flow applications.
Three of the five systems will be added to the seven systems previously installed at HannStar, one of the largest TFT-LCD manufacturers in Taiwan, to support high-flow, special gas applications.
The systems are designed to deliver nitrous oxide, ammonia and nitrogen trifluoride, and feature the BOC Edwards 'SpectraSure iGSC Control System'.
Two additional SpectraSure BSGS systems have been ordered to support the high-flow special gas requirements at a new 300 mm, state of the art semiconductor foundry being built in Taiwan.
