Air Liquide recently introduced a new on-site fluorine solution (FLORA) for tool cleaning in the semiconductor industry.
In the FLORA offer, Air Liquide provides a complete solution ranging from fluorine cylinder supply to on-site fluorine generation, including all necessary related equipment. This process has been successfully pioneered with Tokyo Electron Limited (TEL), Japan, a worldwide leader in semiconductor process equipment, for their TELFORMULA?semiconductor tool.
Air Liquide builds, owns and operates all the systems which ensure continuous supply of fluorine gas to the customer through Total Gas and Chemical Management centers (more than 60 Air Liquide TGCM and 800 specialists worldwide)
