Linde recently announced that it has started up a new SPECTRA high purity nitrogen generator to support the expansion of a leading semi-conductor manufacturer in the ZhangJiang Hi-tech Park, Shanghai.

Linde's nitrogen will be used throughout the new semi-conductor fabrication plant, supporting direct production process applications and the general purging and inerting of various semiconductor manufacturing systems.

The new plant, installed and operated by Linde's joint venture Linde LienHwa (LLH), will also supply nitrogen via pipeline to existing customers in the industrial park.

"With this new investment we are pleased to safely and reliably support our customer's growth, while also upgrading our infrastructure to meet increased demand in the Electronics market", said LLH China President, Stan Tang.