Air Liquide (AL) will invest close to 200 million euros to build production capacities in the Science Parks of Tainan and Hsinchu, respectively located in the South and the North of Taiwan.

Under a long-term commitment with a semiconductor market leader, this investment will allow AL to supply three semiconductor fabrication plants under construction in Tainan Park, as well as advanced R&D fabs for logic IC chips in Hsinchu Park.

AL will build, own and operate ultra-high purity hydrogen and oxygen plants in each basin for a total of 5,000 N㎥ of hydrogen per hour and two large scale plants in Hsinchu to produce high-purity nitrogen and argon, for an additional capacity of 120,000 N㎥ of high purity nitrogen per hour.

It will also supply large volumes of Helium to these fabs. The first plants are expected to start during the second quarter of 2021.